I14 |
Electron optical systems, guns
and lenses |
|
[Thursday, July 13, 16.00-18.30, Room F] |
Chair: |
P. Kruit, Delft; V. Kolařík, Brno; |
Oral presentations: |
|
16.00-16.40 |
Modern electron optics in SEM and inspection (invited)
E. Plies |
16.40-17.20 |
Advances in TEM instrumentation (invited)
P. Kruit |
17.20-17.35 |
A high resolution add-on lens for scanning electron microscopes
A. Khursheed,
N. Karuppiah, S.H. Koh |
17.35-17.50 |
Advances in high-throughput multiple electron-beam lithography
M. Mankos,
T. H. P. Chang |
17.50-18.05 |
Investigations of an electrostatic duo-hexapole-stigmator
J. Bärtle,
E. Plies |
18.05-18.20 |
SEM resolution improvement at low voltage with gun monochromator
J.E.
Barth, M.D. Nykerk, H.W. Mook, P. Kruit |
Posters: |
[Thursday, July 13, 13.30-14.50] |
I14-1 |
Construction and characterisation of a TEM specimen holder
for in situ application of magnetic in-plane fields
T. Uhlig,
M. Heumann, M. Schneider, H. Hoffmann, J. Zweck |
I14-2 |
On the enhancement factors for electron field emitters
C. Edgcombe,
U. Valdre |
I14-3 |
Investigation of an EuS-coated cooled field emitter for
application in state on the art electron microscopes
H. Wittel,
A. Schäfer, F. Hasselbach |
I14-4 |
Test specimens for SEM
F. Matějka,
Z. Ryzí |
I14-5 |
Field emission SEM with a newly developed FEGUN and a
conical strongly excited objective lens
H. Kazumori,
A. Yamada, M. Mita, T. Nokuo, M. Saito |