| I05 |
Low energy electron microscopy |
|
[Tuesday, July 11, 09.30-12.00, Room F] |
| Chair: |
G. Lilienkamp, Clausthal; L. Frank, Brno; |
| Oral presentations: |
|
| 09.30-10.05 |
Aspects of aberration correction in LVSEM (invited)
J. Zach |
| 10.05-10.40 |
Scanning low and very low energy electron microscopy
(invited)
I. Müllerová,
L. Frank |
| 10.40-11.15 |
New aspects in LEEM and spectroscopic emission microscopy
instrumentation (invited)
G. Lilienkamp |
| 11.15-11.30 |
X-ray photoemission and low energy electron microscope
V. Kolařík,
R. Vašina, M. Mynář, T. Bejdák |
| 11.30-11.45 |
Low voltage electron microscope II. - Applications
E. Coufalová,
A. Delong |
| 11.45-12.00 |
Low energy electron scattering - Monte Carlo simulation
H. J.
Fitting, J. Ch. Kuhr |
| Posters: |
[Tuesday, July 11, 13.30-14.50] |
| I05-1 |
In-depth imaging in S.E.M.
P. Lehuédé,
J. Appriou-Marciano, J. Cazaux |
| I05-2 |
Double scintillation detector with a conical retarding
lens for SEM
W. Slowko,
W. Drzazga |
| I05-3 |
Quantitative topographic contrast in LV SEM
W. Slowko,
J. Hejna |
| I05-4 |
Energy filtering scanning transmission electron microscopy
at low voltage with a 'simulated' spherical deflection analyzer
K.H. Krämer,
H. Kohl |
| I05-5 |
Low voltage electron microscope III. - Present and future
possibilities
P. Štěpán,
A. Delong |
| I05-6 |
Low voltage electron microscope I. - Design
A. Delong,
K. Hladil, V. Kolařík, P. Pavelka |
| I05-7 |
Dimension measurement in a cathode lens equipped low-energy
SEM
O. Hutař,
M. Oral, I. Müllerová, L. Frank |
| I05-8 |
Application of low-energy backscattered electron detection
in the inspection of semiconductor devices technology
O. Hutař,
M. Oral, I. Müllerová, V. Romanovský |
| I05-9 |
Signal detection near the critical energy of non-charging
illumination in a low-energy SEM equipped with a cathode lens
J. Káňová,
L. Frank |
